Equipments


[for sample preparation]

Qucik Coater (DC magnetron sputtering)
- 1 cathode (target)

RF sputtering

RF magnetron sputtering
- 3 cathodes (targets)

RF sputtering

Mutilayer films making system (vacuum evaporation system with load-locked system)
- 6 crucibles (co-evaporation, available)
- 3 electron-beam (EB) sources

evaporation system

Glove-box with gas purification system
(coupling with the evaporation system in the left side)









[for evaluation]

electromagnet no. 1(air cooling)
(appicable maximum field, 200 mT)


(in preparation)



electromagnet no. 2(air cooling)
(appicable maximum field, 230 mT)


(in preparation)



electromagnet no. 3(water cooling)
(appicable maximum field, 1.8 T)


Fluoresence Spectrometer




Magnetoresistance effect measurement system(DIY)




(in preparation)







Spin dynamics measurement system
(Network analyzer: Max. freq., 13.5 GHz)








[others in Osaka City Univ.]


- Laser Photo-lithography system (in Tsujimoto lab., Graduate School of Enginnering)
- Annealing system in magnetic field (in Tsujimoto lab., Graduate School of Enginnering)
- Vibrationg sample magnetometer (VSM) (in H. Tsujimoto lab., Graduate School of Enginnering)
- Electron spin resonance system (ESR) (in Y. Teki lab., Graduate School of Enginnering)
etc.


Return to the Top

Copyright (c) Eiji SHIKOH Laboratry All Rights Reserved